MKS 1179BX23CR14VSPC1 Flow Meter HM20-4VKLC(M5)-M4 HiPurity Diaphragm Valve 1/4" – Used

$178.34

1 in stock

SKU: 188386794936 Category:

Description

Hamlet  1179BX23CR14VSPC1

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Here is an MKS Mass Flo Meter 1179BX23CR14VSPC1 with a Hamlet HM20-4VKLC(M5)-M4 High Purity Diaphragm Valve 1/4″. These are ultra-high purity valves. These were previously used with process gases on semiconductor equipment. Specs are listed above.

LOCATION: D0201

07/23 CV

5/26 RL

Technical Specifications
make hamlet
valve part number hm20-4vklc(m5)-m4
flow meter make mks
flow meter part number 1179bx23cr14vspc1
ports 2 port valve
material 316 stainless steel
size 1/4″
seals pctfe
control pneumatic pilot diaphragm valve

Item Condition: Used Shipping

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Additional information

Weight 2.21 kg
Dimensions 14.00 × 8.00 × 8.00 cm
Brand

MKS

MPN

1179BX23CR14VSPC1

Suitable Media

Nitrous oxide

Valve Operation

Air-Operated

Valve Make

Hamlet

Valve part number

HM20-4VKLC(M5)-M4

Condition

Used

MKS 1179BX23CR14VSPC1 Flow Meter HM20-4VKLC(M5)-M4 HiPurity Diaphragm Valve 1/4" - Used
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