Description

Hamlet 1179BX23CR14VSPC1

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Here is an MKS Mass Flo Meter 1179BX23CR14VSPC1 with a Hamlet HM20-4VKLC(M5)-M4 High Purity Diaphragm Valve 1/4″. These are ultra-high purity valves. These were previously used with process gases on semiconductor equipment. Specs are listed above.

LOCATION: D0201

07/23 CV

5/26 RL

Technical Specifications
make	hamlet
valve part number	hm20-4vklc(m5)-m4
flow meter make	mks
flow meter part number	1179bx23cr14vspc1
ports	2 port valve
material	316 stainless steel
size	1/4″
seals	pctfe
control	pneumatic pilot diaphragm valve

Item Condition: Used Shipping

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Additional information

Weight	2.21 kg
Dimensions	14.00 × 8.00 × 8.00 cm
Brand	MKS
MPN	1179BX23CR14VSPC1
Suitable Media	Nitrous oxide
Valve Operation	Air-Operated
Valve Make	Hamlet
Valve part number	HM20-4VKLC(M5)-M4
Condition	Used