Description
High Vacuum Heated Sensor Viewport / RGA Sputtering Analysis
This assembly was used for sensing on high vacuum sputtering chamber. There is a small viewport up top with an aluminum mounting bracket that can hold fiber beam sensors. There is a coil heater underneath with a thermocouple that appears to have been part of the sensing process. These were installed near the residual gas analyzers and could have been used with that process. The housing appears to be in great shape as shown.
Location; C 1405 14-5ListN